article · Ceramics International

Parametric study on dual ablation and surface performance in hydrochloric film-assisted laser processing of AlN

J H Liu
Rong Bian
Shijie Zhao
Ezutah Udoncy Olugu
Ni Chen
Yonghui Xu
Ning He

2026University of the Witwatersrand

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Research topics

Laser Material Processing Techniques
Anodic Oxide Films and Nanostructures
Acoustic Wave Resonator Technologies

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DOI: 10.1016/j.ceramint.2026.07.015

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