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Surface Plasmon Polariton resonant sensors (SPPs) have found wide-ranging applications, particularly for nanoscale sensing. The SPP dispersion is determined by the properties of a limited number of suitable metals and cannot be arbitrarily tuned. The proposed gas sensor is based on surface plasmon polariton manipulated in the metamaterial surface. The plasmonic sensor utilizes a metal-air interface to detect and analyze various substances and phenomena in the mid-infrared range. The utilization of the Mid-infrared (MIR) wavelength range offers numerous benefits across a wide range of applications, including chemical and biological detection. This paper introduces a metasurface composed of highly doped silicon that demonstrates a plasmonic effect in the mid-infrared wavelength range. Silicon has several benefits, including compatibility with CMOS technology and easy manufacturing utilizing traditional silicon fabrication techniques. In addition, operating in the mid-infrared (mid-IR) range and using doped silicon material enables the development of integrated plasmonic devices at the microscale. In this paper, a meta surface plasmonic grating is proposed for sensing and detecting the refractive index changes. In order to test the performance of the plasmonic sensor, a commercial Lumerical software based on finite difference time domain (FDTD) has been used. The suggested design shows high sensitivity at λ = 13.9807 μm and it can be used for gas sensing applications.
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DOI: 10.1117/12.3007639
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